Gofret tashuvchining joriy etilishi
MAHSULOT KATEGORİYASI
▶PECVD & TALOX jarayoni uchun gofret tashuvchi tizim
• PECVD va TALOX grafitli qayiq (M4~M12)
• Vertikal SM-qayiq (M4, M6)
• Implant va dush uchun grafit qismi (M4~M6)
• C/C laganda va keramik qoplama
• Metall RIE-Tray va keramik qoplama
• Vakuumli muhrlash: O-Ring & SQ-Ring
▶Teksturalash va ho'l surtish jarayoni
• LSC H-Carrier yoki kassetali (M4~M12)
• LSC V-Carrier yoki kassetali (M4~M12)
• ASC tashuvchisi yoki kassetali (M4, M6)
• W/F tashuvchi va saqlash qutisi (M4~M12)
• Transport g'ildiragi (rolikli) seriyasi
▶Quyosh batareyasi tashuvchisi va metall tashuvchisi
• TRC tashuvchisi yoki kassetali (M4~M12)
• Jurnal (BELT bilan)
GRAFIT QAYIQ (H-Type)
19P6-216CT (WF M4~M12)
GRAFIT QAYIQ (H-Type)
21P6-240CT WF M4~M12)
GRAFIT QAYIQ (H-Type)
23P7-308CT(W/F M4~M12)
GRAFIT QAYIQ (H-Type)
22P/7-294TP (W/F M4~M12)
GRAFIT QAYIQ (H-Type)
W182-22P7-294CT (W/F M12)
W182-21P6-240CT (W/F M12)
WF tashuvchi va saqlash qutisi (~M12)
C/C TALASI yoki tashuvchi (M4~M10)
C/C TALASI yoki tashuvchi (M4~M10)
Vertikal qayiq (SM) M6
LSC-H-CARRIER(~M12)
LSC-V-CARRIER(~M12)
ASC CARRIER (~M6)
TRC CARRIER(~M12)
TRC CARRIER(~M12)
GRAFIT-QAYIQ(M12)
PECVD jarayoni uchun gofret tashuvchi tizim
▶ GRAFIT QAYIQ (CT-Designed) M10/M12 Jarayoni
• MAXSUS DIZAYN kontseptsiyasi
▶ GRAFIT BOAT (CT-Designed) M4/M6 jarayoni
▶ QAYiq aksessuarlari qismlari
▶ VERTIKAL BOAT-161,7 mm VAFEL
▶ VERTIKAL BOAT-166 mm VAFEL
▶ Vertikal qayiq-161,7 mm, 166 mm VAFER
Quyosh batareyasi tashuvchisi va metall TRC tashuvchisi
TURI: Avtomatlashtirish
Gofret oʻlchami: ① 156×156MM ② 156.75×156.75MM
③161,7x161,7MM ④166x166MM
⑤ 180×180mm ⑥ 210×210mm
FOYDALANISHI: Yuk tashish (kasetali)
QUVVATLI: 100 varaq
PITCH: 4,76 mm/5,953 mm/6,35 mm
O'lchami: Taxminan 559 × 220 × 220 mm
Taxminan 712×260×260MM
AVZULIGI: Atmosfera
MATERIAL : OLAN,YON BARI-Aluminiy (anodlash)
YON PLITA-POM (antistatik)
Pastki novda qopqog'i-EPDM/PU/VITON (ASE)
TRC-METAL tashuvchi (U'SER LINE)
TRC-METAL tashuvchi (U'SER LINE)
TRC-METAL tashuvchi (U'SER LINE)
DUSH PLAKASI VA IMPLANT, tashuvchi
